Resistive switching characteristic and uniformity of low-power HfO<sub><italic>x</italic></sub>-based resistive random access memory with the BN insertion layer

Resistive switching characteristic and uniformity of low-power HfO_x-based resistive random access memory with the BN insertion layer

Su Shuai, Jian Xiao-Chuan, Wang Fang^†,, Han Ye-Mei, Tian Yu-Xian, Wang Xiao-Yang, Zhang Hong-Zhi, Zhang Kai-Liang^‡,

Statistical distributions of (a) HRS and LRS (b) V_set and V_reset in the 100 continuous switching cycles for Ta/HfO_x/TiN device and Ta/HfO_x/BN/TiN device.