Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas
Zhao Yan1, Gao Wei1, Xu Bo2, Li Ying-Ai1, Li Hong-Dong1, Gu Guang-Rui2, Yin Hong1, †,
       

FTIR spectra of the BN film deposited for 15 h. The insert shows the corresponding cross-section SEM image.