Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas

Zhao Yan¹, Gao Wei¹, Xu Bo², Li Ying-Ai¹, Li Hong-Dong¹, Gu Guang-Rui², Yin Hong^{1, †,}

FTIR spectra of the BN film deposited for 15 h. The insert shows the corresponding cross-section SEM image.