Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas
Zhao Yan1, Gao Wei1, Xu Bo2, Li Ying-Ai1, Li Hong-Dong1, Gu Guang-Rui2, Yin Hong1, †, 
SEM images of as-deposited c-BN films with thickness of 200 nm (a), 250 nm (b), 300 nm (c), 2.3 μm (d), 4.5 μm (e), respectively. Scale bar: 100 nm.
