Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas

Zhao Yan¹, Gao Wei¹, Xu Bo², Li Ying-Ai¹, Li Hong-Dong¹, Gu Guang-Rui², Yin Hong^{1, †,}

Phase diagram of BN films, showing the variations of hydrogen content with substrate temperature (a), and bias voltage (b), respectively.