Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N2/Ar discharges
Liang Ying-Shuang, Zhang Yu-Ru, Wang You-Nian†, 
Schematic diagram of the reactor configuration.
Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N2/Ar discharges |
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Liang Ying-Shuang, Zhang Yu-Ru, Wang You-Nian†,
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Schematic diagram of the reactor configuration. |
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