Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N<sub>2</sub>/Ar discharges

Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N₂/Ar discharges

Liang Ying-Shuang, Zhang Yu-Ru, Wang You-Nian^†,

Spatial distributions of the N density with different R_r: (a) R_r = 0 cm, (b) R_r = 10.5 cm, and (c) R_r = 18.8 cm.