The morphology features of the active layer with and without HCO. (a) The reference film, Rms = 1.14; (b) 0.1%, Rms = 0.87; (c) 0.3%, Rms = 1.01; (d) 0.5%, Rms = 0.94; (e) 0.7%, Rms = 0.97; (f) 0.9%, Rms = 1.07.