Effect of NO annealing on charge traps in oxide insulator and transition layer for 4H-SiC metal–oxide–semiconductor devices
Jia Yifan
1
, Lv Hongliang
1, †,
, Niu Yingxi
2
, Li Ling
2
, Song Qingwen
1, 3
, Tang Xiaoyan
1, ‡,
, Li Chengzhan
4
, Zhao Yanli
4
, Xiao Li
5
, Wang Liangyong
5
, Tang Guangming
5
, Zhang Yimen
1
, Zhang Yuming
1
Bias stress and measurement sequence for the TDBS measurements.