Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces

Han Jinghua¹, Luo Li^{1, 2}, Zhang Yubo³, Hu Ruifeng¹, Feng Guoying^{1, †,}

The expansion of a laser plasma shock wave. (a) The radius of the shock wave front. (b) The velocity of shock wave versus time. (c) Expansion distance versus time. (d) The maximum expansion distance versus the energy of the laser pulse.