Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces

Han Jinghua¹, Luo Li^{1, 2}, Zhang Yubo³, Hu Ruifeng¹, Feng Guoying^{1, †,}

The spectral characteristic of the silicon and the laser plasma radiation. (a) The transmittance spectra of silicon, (b) the emission spectra of laser plasma.