Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces

Han Jinghua¹, Luo Li^{1, 2}, Zhang Yubo³, Hu Ruifeng¹, Feng Guoying^{1, †,}

Morphologies of silicon surface with particles before cleaning (a) and after cleaning with a gap of 3 mm, and a laser pulse energy of 0.2 J (b) and 0.4 J (c).