Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces

Han Jinghua¹, Luo Li^{1, 2}, Zhang Yubo³, Hu Ruifeng¹, Feng Guoying^{1, †,}

Morphologies of silicon surface with particles before cleaning (a) and after cleaning with a laser pulse energy of 0.5 J, and a gap of 5 mm (b) and 3.5 mm (c).