Improvement in the electrical performance and bias-stress stability of dual-active-layered silicon zinc oxide/zinc oxide thin-film transistor
Liu Yu-Rong
1, 2, †,
, Zhao Gao-Wei
1
, Lai Pai-To
3
, Yao Ruo-He
1, 2
AFM images of the SZO thin films for Si content values of (a) 2.3%, (b) 3.8%, and (c) 7.9%.