Fabrication of Al/AlO |
(a) An e-beam lithographic pattern to fabricate large-area Josephson junction using the bridge-free technique. Blue color indicates an open area of junction location exposed with PMMA dose while orange color the area exposed with MAA dose. (b) The SEM picture of the Josephson junction after shadow evaporation and lift-off. The red rectangle is the junction with an area of 2 μm × 3 μm. (c) |