Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics
He Xiang, Zhao Heng, Wang Gang, Zhou Peifan, Ma Ping
       

Typical morphologies of the exposed subsurface damages in samples (a) A, (b) B, (c) C, and (d) D, after the HF etching process. The continuous polishing scratches are marked by white squares, and the polishing dots are marked by red circles.