Apodized grating coupler using fully-etched nanostructures

Wu Hua^{1, 2}, Li Chong¹, Li Zhi-Yong³, Guo Xia^{1, 4, †,}

SEM images of the fabricated apodized (a) and uniform (b) grating coupler with nanorectangles, apodized (c) and uniform (d) grating coupler with nanoholes.