Enhanced light extraction of GaN-based light-emitting diodes with periodic textured SiO<sub>2</sub> on Al-doped ZnO transparent conductive layer

Enhanced light extraction of GaN-based light-emitting diodes with periodic textured SiO₂ on Al-doped ZnO transparent conductive layer

Zhao Yu^{1, 2, †,}, Fan Bingfeng^{1, †,}, Chen Yiting¹, Zhuo Yi¹, Pang Zhoujun², Liu Zhen², Wang Gang^{1, ‡,}

(a) Cross-section SEM image and (b) top view SEM image of the surface patterned LED chip with AZO-TCL.