Enhanced light extraction of GaN-based light-emitting diodes with periodic textured SiO<sub>2</sub> on Al-doped ZnO transparent conductive layer

Enhanced light extraction of GaN-based light-emitting diodes with periodic textured SiO₂ on Al-doped ZnO transparent conductive layer

Zhao Yu^{1, 2, †,}, Fan Bingfeng^{1, †,}, Chen Yiting¹, Zhuo Yi¹, Pang Zhoujun², Liu Zhen², Wang Gang^{1, ‡,}

Schematic illustration of (a)–(e) the critical steps of pattern transfer using AAO as the ICP etching mask.