Improving breakdown voltage performance of SOI power device with folded drift region

Li Qi¹, Li Hai-Ou^{2, †,}, Huang Ping-Jiang², Xiao Gong-Li³, Yang Nian-Jiong^{4, ‡,}

(a) Dependences of BV on N_d and D; (b) dependences of BV on N_d and W; and (c) dependences of BV on N_d and H.