Improving breakdown voltage performance of SOI power device with folded drift region
Li Qi
1
, Li Hai-Ou
2, †,
, Huang Ping-Jiang
2
, Xiao Gong-Li
3
, Yang Nian-Jiong
4, ‡,
(a) Schematic cross-section view of the ENDIF IDT LDMOS; (b) schematic of charge distributions.