Preparation and structural properties of thin carbon films by very-high-frequency magnetron sputtering
Gao Ming-Wei1, Ye Chao1, 2, †, 
, Wang Xiang-Ying3, He Yi-Song1, Guo Jia-Min1, Yang Pei-Fang1
, Wang Xiang-Ying3, He Yi-Song1, Guo Jia-Min1, Yang Pei-Fang1 FTIR spectroscopy of the a-C thin films.
