Preparation and structural properties of thin carbon films by very-high-frequency magnetron sputtering
Gao Ming-Wei
1
, Ye Chao
1, 2, †,
, Wang Xiang-Ying
3
, He Yi-Song
1
, Guo Jia-Min
1
, Yang Pei-Fang
1
Variation of average mean roughness
R
a
with the sputtering power.