Structural and mechanical properties of Al–C–N films deposited at room temperature by plasma focus device
Umar Z A1, †, 
, Ahmad R2, Rawat R S3, Baig M A1, Siddiqui J4, Hussain T4
, Ahmad R2, Rawat R S3, Baig M A1, Siddiqui J4, Hussain T4 Variation in nanohardness and elastic modulus of the films deposited with different number of focus shots.
