Structural and mechanical properties of Al–C–N films deposited at room temperature by plasma focus device
Umar Z A1, †, 
, Ahmad R2, Rawat R S3, Baig M A1, Siddiqui J4, Hussain T4
, Ahmad R2, Rawat R S3, Baig M A1, Siddiqui J4, Hussain T4 The XPS spectra of the N 1s peak for the films deposited with (a) 10, (b) 20, and (c) 30 focus shots.
