Heterogeneous integration of GaAs pHEMT and Si CMOS on the same chip

Heterogeneous integration of GaAs pHEMT and Si CMOS on the same chip

Wu Li-Shu^†,, Zhao Yan, Shen Hong-Chang, Zhang You-Tao, Chen Tang-Sheng

Micrographs of misalignment of GaAs and Si CMOS.