Heterogeneous integration of GaAs pHEMT and Si CMOS on the same chip
Wu Li-Shu†, 
, Zhao Yan, Shen Hong-Chang, Zhang You-Tao, Chen Tang-Sheng
, Zhao Yan, Shen Hong-Chang, Zhang You-Tao, Chen Tang-Sheng Cross-sectional views of fabricated GaAs pHEMTs on Si CMOS, with (a) 1 μm-BCB, (b) 2 μm-BCB, (c) 3 μm-BCB, and (d) 4 μm-BCB.
