Understanding of surface pit formation mechanism of GaN grown in MOCVD based on local thermodynamic equilibrium assumption |
(a) Schematic illustration of the surface pit formation in practice caused by screw type dislocation. When the dislocation core reaches a critical curvature, the spiral at the edge away from the center still keeps enlarging. (b) Schematic illustration of the pit profile. The dashed line is constructed according to Eq. ( |