Simulation of nanoparticle coagulation in radio-frequency C<sub>2</sub>H<sub>2</sub>/Ar microdischarges

Simulation of nanoparticle coagulation in radio-frequency C₂H₂/Ar microdischarges

Liu Xiang-Mei^†,, Li Qi-Nan, Li Rui

The spatial variation profiles of the electron temperature (T_e) and the ionization coefficient (k_r) for Ar, as well as the dissociative ionization coefficient (k_di) for C₂H₂, with the settings the same as those in Fig. 1.