Simulation of nanoparticle coagulation in radio-frequency C<sub>2</sub>H<sub>2</sub>/Ar microdischarges

Simulation of nanoparticle coagulation in radio-frequency C₂H₂/Ar microdischarges

Liu Xiang-Mei^†,, Li Qi-Nan, Li Rui

The positive ions, negative ions and electron density obtained from our simulation, with V = 100 V, P = 600 Torr, L = 1000 μm.