A nano-scale mirror-like surface of Ti–6Al–4V attained by chemical mechanical polishing
Liang Chenliang1, 2, Liu Weili1, †, , Li Shasha1, 2, Kong Hui1, 2, Zhang Zefang1, Song Zhitang1
       

The model of synergy of chemical and mechanical effects. An oxide layer forms on the metal surface, then it is removed by abrasive particles. When there is enough oxidant in solution, the oxide layer can reform as soon as possible, so the MRR is high. However, when the amount of H2O2 is little in solution, the oxide layer cannot form again on time when the fresh metal is exposed.