Influences of different structures on the characteristics of H2O-based and O3-based LaxAlyO films deposited by atomic layer deposition
Fei Chen-Xi, Liu Hong-Xia†, , Wang Xing, Zhao Dong-Dong, Wang Shu-Long, Chen Shu-Peng
       

XPS spectra of the LaxAlyO nanolaminates with H2O as the oxidant: (a) Al 2p, (b) O 1s, (c) La 3d5/2, (d) Si 2p.