Contact resistance asymmetry of amorphous indium–gallium–zinc–oxide thin-film transistors by scanning Kelvin probe microscopy
Wu Chen-Fei
1, 2
, Chen Yun-Feng
1, 2
, Lu Hai
1, 2, †,
, Huang Xiao-Ming
3
, Ren Fang-Fang
1, 2
, Chen Dun-Jun
1, 2
, Zhang Rong
1, 2
, Zheng You-Dou
1, 2
Schematic diagram of the SKPM setup and the a-IGZO TFT under test.