Thermal effect on endurance performance of 3-dimensional RRAM crossbar array |
(a)–(c) Schematics of the array structure including the Pt electrode component with various sizes from 3×3×1 to 3×3×3 block array, respectively. (d)–(f) Temperature maps of the cross-sections (blue planes) in (a)–(c). The programmed RRAMs are connected with diodes in green color. |