Aluminum incorporation efficiencies in <bold><italic>A</italic></bold>- and <bold><italic>C</italic></bold>-plane AlGaN grown by MOVPE

Aluminum incorporation efficiencies in A- and C-plane AlGaN grown by MOVPE

Han Dong-Yue, Li Hui-Jie^†,, Zhao Gui-Juan, Wei Hong-Yuan, Yang Shao-Yan, Wang Lian-Shan

Plots of Al content versus chamber pressure in (a) A- and (b) C-plane AlGaN films, where the dashed lines correspond to the mass-transport limit.