Aluminum incorporation efficiencies in A- and C-plane AlGaN grown by MOVPE
Han Dong-Yue, Li Hui-Jie†, , Zhao Gui-Juan, Wei Hong-Yuan, Yang Shao-Yan, Wang Lian-Shan
       

Plots of Al content versus TMAl gas inlet ratio for A- and C-plane AlGaN films, where the dashed line corresponds to the mass-transport limit.