Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria

He Xiang, Wang Gang, Zhao Heng, Ma Ping^†,

The surface roughness values of samples: (a) A1, (b) A2, (c) A3, (d) B1, (e) B2, and (f) B3.