Study on electrical defects level in single layer two-dimensional Ta<sub>2</sub>O<sub>5</sub>

Study on electrical defects level in single layer two-dimensional Ta₂O₅

Li Dahai¹, Song Xiongfei², Hu Linfeng³, Wang Ziyi¹, Zhang Rongjun^{1, †,}, Chen Liangyao¹, Zhang David Wei², Zhou Peng^{2, ‡,}

XPS acquired on single layer Ta₂O₅ for samples dipped for 20 minutes, including (a) Ta 4f and (b) O 1s of as-grown sample and (c) Ta 4f and (d) O 1s of annealed sample, respectively. The black circles are experimental XPS data; other colors are fitted curves.