Fabrications and characterizations of high performance 1.2 kV, 3.3 kV, and 5.0 kV class 4H–SiC power SBDs |
Forward current density–voltage characteristics of SiC SBDs fabricated with wafers No. 1–No. 3 having different epitaxial thickness values (10 μm, 30 μm, and 50 μm). |