Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating
Lv Qian-Qian
, Pan Pan
, Ye Han
, Yin Dong-Dong
, Wang Yu-Bing
, Yang Xiao-Hong
, Han Qin
†,
Microscopeimage of the fabricated ECPD array integrated with a 13-channel AWG.