Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

Lv Qian-Qian, Pan Pan, Ye Han, Yin Dong-Dong, Wang Yu-Bing, Yang Xiao-Hong, Han Qin^†,

The scanning electron micrograph (SEM) images of the regrowth structure: (a) the epitaxial structure by SAG in [011] orientation; (b) the epitaxial structure by SAG in [0 −1 1] orientation.