Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

Lv Qian-Qian, Pan Pan, Ye Han, Yin Dong-Dong, Wang Yu-Bing, Yang Xiao-Hong, Han Qin^†,

(a) Cross section of the AWG output waveguide; (b) the lateral section of the ECPD.