Fabrication and characterization of the normally-off N-channel lateral 4H–SiC metal–oxide–semiconductor field-effect transistors
Song Qing-Wen1, 2, †, , Tang Xiao-Yan2, ‡, , He Yan-Jing2, Tang Guan-Nan2, Wang Yue-Hu2, Zhang Yi-Meng2, Guo Hui2, Jia Ren-Xu2, Lv Hong-Liang2, Zhang Yi-Men2, Zhang Yu-Ming2
       

Distribution of interface state density (Dit) near the conduction band edge (Ec) of 4H–SiC estimated using the hi-lo CV method.