The V–I plots of RF discharge under different pressures. (a) 500 Pa, PL = 12 W; (b) 1000 Pa, PL = 15 W; (c) 5000 Pa, PL = 18 W; (d) 20000 Pa, PL = 19 W; (e) 40000 Pa, PL = 25 W; (f) 60000 Pa, PL = 47 W; (g) 70000 Pa, PL = 85 W; (h) 96000 Pa, PL = 100 W. |