A uniform doping ultra-thin SOI LDMOS with accumulation-mode extended gate and back-side etching technology
Zhang Yan-Hui
1
, Wei Jie
1
, Yin Chao
1
, Tan Qiao
1
, Liu Jian-Ping
1
, Li Peng-Cheng
1
, Luo Xiao-Rong
1, 2, †,
(a) Influences of
L
d
and
t
box
on BV, (b) dependences of the BV and
R
on,sp
on
L
d
.