Superior material qualities and transport properties of InGaN channel heterostructure grown by pulsed metal organic chemical vapor deposition
Zhang Ya-Chao
, Zhou Xiao-Wei
, Xu Sheng-Rui
, Chen Da-Zheng
, Wang Zhi-Zhe
, Wang Xing
, Zhang Jin-Feng
, Zhang Jin-Cheng
, Hao Yue
AFM images of surface morphology of InGaN channel with scan areas of (a) 5 × 5 and (b) 2 × 2 μm
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