Fabrication of superconducting NbN meander nanowires by nano-imprint lithography

Yang Mei^{1, 2}, Liu Li-Hua¹, Ning Lu-Hui², Jin Yi-Rong², Deng Hui², Li Jie², Li Yang¹, Zheng Dong-Ning^{2, †,}

The superconducting critical temperatureT_cdependence on the nitrogen partial pressure (P_total≈ 1 Pa;d≈ 50 nm).