Fabrication of superconducting NbN meander nanowires by nano-imprint lithography
Yang Mei
1, 2
, Liu Li-Hua
1
, Ning Lu-Hui
2
, Jin Yi-Rong
2
, Deng Hui
2
, Li Jie
2
, Li Yang
1
, Zheng Dong-Ning
2, †,
Preparation of NbN meander nanowires by UV-NIL and RIE.