Fabrication of superconducting NbN meander nanowires by nano-imprint lithography
Yang Mei1, 2, Liu Li-Hua1, Ning Lu-Hui2, Jin Yi-Rong2, Deng Hui2, Li Jie2, Li Yang1, Zheng Dong-Ning2, †,
       

Sequence of technological operations in HE-NIL process.