Fabrication of superconducting NbN meander nanowires by nano-imprint lithography
Yang Mei1, 2, Liu Li-Hua1, Ning Lu-Hui2, Jin Yi-Rong2, Deng Hui2, Li Jie2, Li Yang1, Zheng Dong-Ning2, †,
       

Resistance–temperature curve of the 4 nm thick NbN film whenPN2is about 0.16 Pa.