Fabrication of superconducting NbN meander nanowires by nano-imprint lithography
Yang Mei
1, 2
, Liu Li-Hua
1
, Ning Lu-Hui
2
, Jin Yi-Rong
2
, Deng Hui
2
, Li Jie
2
, Li Yang
1
, Zheng Dong-Ning
2, †,
The superconducting critical temperature
T
c
dependence on the NbN film thickness.